CSTIC 2011(China Semiconductor Technology International Conference 2011)
発表資料一覧
Parhat Ahmet
TiN/W/La
2
O
3
/Si High-k Gate Stack for EOT below0.5nm
川那子 高暢
Metal Inserted Poly-Si Stacks with La
2
O
3
Gate Dielectrics for Scaled EOT and V
FB
Control by Oxygen Incorporation
佐藤 創志
Structural Effects of Channel Cross‐section on a Gate Capacitance of Silicon Nanowire Field‐Effect Transistors
神田 高志
Annealing Effect on the Electrical Properties of La
2
O
3
/InGaAs MOS Capacitors